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LED type wafer alignment sensor
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The HD-T1 series is a new wafer alignment sensor. The use of a safe LED light beam now allows for high precision detection with a resolution of 30µm. The sensor is best suited to detect wafer eccentricity, notches and orientation flats. Using linear image sensor methodology and high-speed sampling technology, a wide variety of objects can now be stably measured with great precision at ultra-high speeds. This CCD style sensor is developed for using in almost all fields of industry, e.g. tire manufacturing or semiconductor production (wafer printed circuit boards).
Characteristics:
- No safety measures are required
- High resolution of 30µm
- Easy installation
- No need for beam axis alignment
- Low current consumption of 70mA or less
- Adjustment functions for both span and shift have been incorporated
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HD-T1030 |
HD-T1C |
| Sensor type |
Particular use sensor |
| Sensing width |
30mm |
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| Sensing range |
30mm |
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| Pollution degree |
3 (industrial environment) |
| Ambient temperature |
0 to + 40°C 0 to + 40°C |
| Ambient humidity |
35 to 85% RH |
| Ambient illuminance |
3,000lx |
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| Emitting element |
Red LED 650nm |
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| Supply voltage |
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24V DC ±10% |
| Current consumption |
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70mA or less |
| Response time |
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0.5ms |
| Resolution |
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30µm |
| Linearity |
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±1.0% F.S. |
| Material |
Enclosure: PEI, Front cover: glass, Mounting base: aluminium |
Plastic |
| Cable |
0.5m |
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| Weight approx. |
150g |
85g |
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HD-T1 typical application
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Detecting wafer eccentricities or notches
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