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Particular use sensors

M-DW1 particular use sensor  

  • Wafer-mapping sensor
  • Double-triangulation method
  • Red light transmitting diode
  • Response time 0.5ms
  • Teach-in

EZ-10 particular use sensor  

  • Water detection sensor
  • Reach 5m
  • Compact type

HD-T1 particular use sensor  

  • Wafer alignment sensor
  • Height of measuring panel 30mm
  • Red light transmitting LED